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Please use this identifier to cite or link to this item: http://dspace.unimap.edu.my:80/xmlui/handle/123456789/7134

Title: Development of In-House MOS transistor at KUKUM Micro Fabrication Cleanroom: Microelectronic undergraduate activities
Authors: Marlia, Morsin
Nur Hamidah, Abdul Halim
Uda, Hashim
Hashim, Saim
Keywords: Transistors -- Design and construction;MOS transistor;Metal oxide semiconductors;Module development;Undergarduate module;Microelectronic engineering
Issue Date: 18-May-2005
Publisher: Kolej Universiti Kejuruteraan Utara Malaysia
Citation: p.91-95
Series/Report no.: Proceedings of the 1st National Conference on Electronic Design
Abstract: This paper presents the module development of inhouse MOS transistor device at KUKUM Micro Fabrication Cleanroom. The process started with the establishment of process flow, process modules, and process parameters. Four modules were developed and characterized prior to MOS transistor device fabrication namely dry and wet oxidation and etching, resist thickness and exposure dose optimization, n-type and p-type spin on dopant and diffusion also metal thickness characterization. The data were analyzed and applied in the fabrication of MOS transistor devices. Standard CMOS process was utilized in this experiment. The results for all the processes are present in this paper.
Description: Organized by Kolej Universiti Kejuruteraan Utara Malaysia (KUKUM), 18th - 19th May 2005 at Putra Palace Hotel, Kangar.
URI: http://hdl.handle.net/123456789/7134
Appears in Collections:Conference Papers
Uda Hashim, Prof. Dr.

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