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http://hdl.handle.net/123456789/7120
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| Title: | Effect of rapid thermal annealing on performance of large area crystalline silicon position sensitive detector |
| Authors: | Raid A., Ismail
Abdulmhdi, T. Rahmitalla
Nasser, K. Mahdi |
| Keywords: | Position sensitive detector
Si
Crystalline
Rapid thermal annealing
Semiconductors -- Heat treatment
Crystals
Crystalline silicon
Silicon |
| Issue Date: | 2009 |
| Publisher: | Universiti Malaysia Perlis |
| Citation: | International Journal of Nanoelectronics and Materials, vol.2 (2), 2009, pages 197-204. |
| Abstract: | In this paper we report on the effect of rapid thermal annealing (RTA) on the characteristics of diffused crystalline p-n Si one-dimensional (1-D) position sensitive detector (PSD). The Si-PSDs are made with planer technology using thermal diffusion technique for Si doping. The lateral voltage produced by irradiation of He-Ne laser on PSD was parallel to the plane of junction and dependence linearly on laser spot position. The PSD that treated with best RTA condition (850 °C/15s) exhibited higher position sensitivity (104μV/mm) as compared with that for untreated PSD (31μV/mm).Furthermore, the best PSD gave a non-linearity error of 1.46%. The performance improvement factors such as uniformity, linearity, and responsivity of annealed Si-PSDs are presented and analyzed. |
| Description: | Link to publisher's homepage at http://www.unimap.edu.my/ ; Open access only applicable for vol. 1 ; issue 1, 2008 & vol. 2 ; issue 1 & 2, 2009. |
| URI: | http://hdl.handle.net/123456789/7120 |
| ISSN: | 1985-5761 (Printed)
1997-4434 (Online) |
| Appears in Collections: | International Journal of Nanoelectronics and Materials
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