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Please use this identifier to cite or link to this item: http://dspace.unimap.edu.my:80/xmlui/handle/123456789/2290

Title: Cost Effective Negative Plenum Cleanroom for Microelectronic Engineering undergraduate
Authors: Uda, Hashim
Zul Azhar, Zahid Jamal
Mohammad Nuzaihan, Md Nor
Nur Hamidah, Abdul Halim
Keywords: Clean rooms;Clean rooms -- Study and teaching;Micolelectronic engineering;Clean rooms -- Design;Contamination (Technology);Negative plenum
Issue Date: 2005
Publisher: Kolej Universiti Kejuruteraan Utara Malaysia
Citation: Journal of Engineering Research and Education, vol. 2, 2005, pages 95-102.
Abstract: The Negative Plenum Cleanroom which is design and built by KUKUM is primarily used for the teaching of the undergraduate microelectronic course. The cleanroom is approximately 115m² in size. The level of cleanliness in the cleanroom ranges from ISO Class 5 (Yellow Room) to ISO Class 8 (Grey Area/Utility Chase). The cleanroom is constructed with a negative plenum to house the fan filter units, which make it different from other commercially available cleanrooms. With negative plenum, maintenance work cost will be reduced and make the cleanroom life longer. The main intention of this project is to expose and teach students to appreciate the stringent cleanroom protocols, health and safety requirement in addition to the formal course works.
Description: Link to publisher's homepage at http://jere.unimap.edu.my
URI: http://hdl.handle.net/123456789/2290
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Appears in Collections:Mohammad Nuzaihan Md Nor
Journal of Engineering Research and Education (JERE)
Zul Azhar Zahid Jamal, Dato' Prof. Dr.
Uda Hashim, Prof. Dr.

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