Browsing by Subject "Twyman-Green interferometer (TGI)"
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Microfluidic channel depth determination with Tywman-Green interferometer
(Springer-Verlag London., 2013-07)A microfluidic channel is fabricated on a silica wafer using reactive ion etching (RIE). The depth of the microfluidic channel has been measured using a surface profilometer and a Twyman-Green interferometer (TGI) setup. ...