Browsing by Subject "Semiconductors -- Design and construction"
Now showing items 1-2 of 2
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Study of Deposition Time Influence the Conical Structure during Electron Beam Induced Deposition (EBID)
(Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008-04)Atomic force microscopy (AFM) is now a well-established technique for the surface characterization and imaging of a variety of materials. In AFM the accuracy of data is often limited by the tip geometry and the effect on ... -
Study of the effect of different Gases parameter in Dry Etching process on Etch Rate profile
(Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008-04)The principal focus of this project is dry etching technique by using the Inductively Couple Plasma-Reactive Ion Etching (ICP-RIE). An (ICP) system was chosen because of its high plasma density and low cost relative to ...