Browsing by Author "Siti Fatimah"
Now showing items 1-2 of 2
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Ahli politik di IPT boleh terus aktif
Siti Fatimah; Mohammad Anwar (Berita Harian, 2008-10-17) -
Shallow junction formation: A simulation based study of thermal diffusion by spin-on-dopants technique
Uda, Hashim, Prof. Dr.; Tijjani Adam, Shuwa; Nik Hazura, Nik Hamat; Siti Fatimah (AENSI Publications, 2012)Ultra shallow junction fabrication in large scaled integrated (ULSI) technology is one of the difficult challenges in device manufacturing. Low energy ion implantation is the most widely used technique at present to form ...