Browsing by Author "Hafzaliza Erny, Zainal Abidin"
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A review: Properties of silicon carbide materials in MEMS application
Noraini, Marsi; Burhanuddin, Yeop Majlis; Faisal Mohd, Yasin; Hafzaliza Erny, Zainal Abidin; Azrul Azlan, Hamzah (Universiti Malaysia Perlis (UniMAP), 2020-12)The paper presents the review properties of silicon carbide materials in the MEMS application. The study aims to explore silicon carbide in MEMS technology which considers the development of microscale and integrated devices ...